General Parameters

General

• Maximum Order of Field Decomposition defines 2*OrderX+1 and 2*OrderY+1 of Fourier components along X and Y directions (the total number of components is the product of these values). The OrderX and OrderY values should be adequate to the number of appropriate Rayleigh diffraction orders in every layer. There is a possibility of automatic fixing of this problem (see page Options).
  The Rayleigh diffracted order indexes are calculated in positive directions of X and Y axes.
• Wavelength, measurement unit is nm.
• Polarization. The polarization state is defined by two electric field vectors Es and Ep. The wave vector k of the incident wave and these electric field vectors are mutually orthogonal. Vector Es is parallel the X-Y plane and vector Ep is parallel the incidence plane. Amplitudes of these vectors are defined by the State polarization angle and the phase difference between them is defined by the Phase angle.
  Angles measurement unit is degrees.
  Under exactly normal incidence it is impossible to define the incidence plane unambiguously. In this case depending on a coordinate system the software uses the following rules.
  - For the Plane base coordinate system a plane of AngleI changing is considered as the incident plane.
  - For the Grating base coordinate system a X-Z plane is considered as the incident plane.
• Incidence Angles, the angles definition is explained in the Structure Geometry picture. In the conical mount version the incident wave orientation is defined by two angles (definition depends on Coordinate System). Theirs meaning are obvious from the pictures presented at the same page.
  Measurement unit is degrees.
• Method defines the calculation method Classic or Extended. If classic method is selected then on this control exit a zero interface will be applied to all interfaces.